MPG Halbleiterlabor Review

Session

Clean Room I

13 Dec 2018, 09:00

Conveners

Clean Room I: Session in German

• Laci Andricek

3. Introduction - Overview of last two years in the RR

Florian Schopper (MPG HLL), Gerhard Schaller (MPG HLL)

13/12/2018, 09:00

4. MUTEC and Polysilicon structuring optimisation

Christian Zirr (MPG HLL)

13/12/2018, 09:50