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MPG Halbleiterlabor Review

12–15 Dec 2018
UTC timezone

Contribution List

34 / 34
0. Welcome and Organisation
Jelena Ninkovic (MPG Halbleiterlabor)
12/12/2018, 16:30
1. HLL @ Garching
Jelena Ninkovic (MPG Halbleiterlabor)
12/12/2018, 16:45
2. MIXS@BepiColombo
Dr Johannes Treis (MPG Semiconductor Laboratory)
12/12/2018, 17:15
3. Introduction - Overview of last two years in the RR
Florian Schopper (MPG HLL), Gerhard Schaller (MPG HLL)
13/12/2018, 09:00
4. MUTEC and Polysilicon structuring optimisation
Christian Zirr (MPG HLL)
13/12/2018, 09:50
6. Lithography/Etching Problems and Solutions
Raik Lehmann (MPG HLL)
13/12/2018, 10:50
7. Plasma Etching
Florian Schopper (MPG HLL)
13/12/2018, 11:25
8. Spray coating of TSV and extreme topography
Maria Jegorova (MPG HLL)
13/12/2018, 12:00
25. Edet80k - Project overview
Christian Koffmane (MPI Halbleiterlabor)
13/12/2018, 14:00
31. DMC
Dr Andreas Wassatsch (HLL)
13/12/2018, 14:30
26. Edet80k - All silicon module assembly
Silvia Krivokuca (MPG HLL)
13/12/2018, 14:50
27. Edet80k - Sensor testing
Eduard Prinker (MPG HLL), Mitja Predikaka (MPG HLL)
13/12/2018, 15:15
28. Edet80k - Firmware development
Mikhail Polovykh (MPG HLL)
13/12/2018, 16:30
29. PXD for BELLE II
Laci Andricek (MPG Halbleiterlabor)
13/12/2018, 17:00
30. WFI for ATHENA
Peter Lechner (MPG HLL)
13/12/2018, 17:45
18. GREST and followups
Alexander Baehr (MPG HLL)
14/12/2018, 09:00
19. TRISTAN
Peter Lechner (MPG HLL)
14/12/2018, 09:30
20. DANAE
Hexi Shi (HEPHY), Dr Johannes Treis (MPG Semiconductor Laboratory)
14/12/2018, 10:00
21. ATLAS @HLL
Rainer Richter (MPG HLL)
14/12/2018, 11:00
22. 4 side buttable detector concept
Dr Johannes Treis (MPG Semiconductor Laboratory)
14/12/2018, 11:30
23. New DEPFET R&D production
Alexander Baehr (MPG HLL)
14/12/2018, 14:00
33. Discussion
14/12/2018, 14:30
24. CCD and future R&D production
Rainer Richter (MPG HLL)
14/12/2018, 15:30
32. Discussion
14/12/2018, 16:00
9. Lithography without DWLs
Raik Lehmann (MPG HLL)
15/12/2018, 09:00
10. Lithography DWLs
Anne Burkhardt (MPG HLL)
15/12/2018, 09:20
11. Wet Chemistry
Sven Jansen (MPG HLL)
15/12/2018, 09:40
12. Ovens
Christian Zirr (MPG HLL)
15/12/2018, 10:00
13. Implanter
Mark Matiaske (MPG HLL)
15/12/2018, 10:20
14. Plasma Cluster(s)
Florian Schopper (MPG HLL)
15/12/2018, 11:00
15. Cutters
Mark Matiaske (MPG HLL)
15/12/2018, 11:20
16. New equipment plans
Florian Schopper (MPG HLL)
15/12/2018, 11:40
17. Discussion QA
15/12/2018, 12:00
5. Plasma cluster
Dr Florian Schopper (MPG HLL)
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