12–15 Dec 2018
UTC timezone

Session

Clean Room II

13 Dec 2018, 10:50

Conveners

Clean Room II: Session in German

  • Rainer Richter

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10:00
11:00
12:00
Raik Lehmann
Lithography/Etching Problems and Solutions
10:50 - 11:25
Florian Schopper
Plasma Etching
11:25 - 12:00
Maria Jegorova
Spray coating of TSV and extreme topography
12:00 - 12:30