MPG Halbleiterlabor Review

Session

Technology discussion

15 Dec 2018, 09:00

Conveners

Technology discussion

• Alex Baehr

Technology discussion: Technology discussion

• Jelena Ninkovic (MPG Halbleiterlabor)

9. Lithography without DWLs

Raik Lehmann (MPG HLL)

15/12/2018, 09:00

10. Lithography DWLs

Anne Burkhardt (MPG HLL)

15/12/2018, 09:20

11. Wet Chemistry

Sven Jansen (MPG HLL)

15/12/2018, 09:40

12. Ovens

Christian Zirr (MPG HLL)

15/12/2018, 10:00

13. Implanter

Mark Matiaske (MPG HLL)

15/12/2018, 10:20

14. Plasma Cluster(s)

Florian Schopper (MPG HLL)

15/12/2018, 11:00

15. Cutters

Mark Matiaske (MPG HLL)

15/12/2018, 11:20

16. New equipment plans

Florian Schopper (MPG HLL)

15/12/2018, 11:40

17. Discussion QA

15/12/2018, 12:00