Name: HLL Technology Summit 2025
Start: 2025-10-15T17:00:00+02:00
End: 2025-10-17T17:05:00+02:00
Location: Tutzing Castle

HLL Technology Summit 2025

from Wednesday, October 15, 2025 (5:00 PM) to Friday, October 17, 2025 (5:05 PM)

Monday, October 13, 2025
Tuesday, October 14, 2025
Wednesday, October 15, 2025

5:00 PM Check-In
Check-In
5:00 PM - 6:00 PM
Room: Front desk

6:00 PM Dinner
Dinner
6:00 PM - 7:00 PM
Room: Restaurant
7:00 PM Keynote: MPG HLL - current status and prospects - Jelena Ninkovic (MPG Halbleiterlabor)
Keynote: MPG HLL - current status and prospects
- Jelena Ninkovic (MPG Halbleiterlabor)
7:00 PM - 8:00 PM
Room: Auditorium Keynote presentation followed by extensive Q/A and discussion
Thursday, October 16, 2025

9:00 AM Welcome
Welcome
9:00 AM - 9:10 AM
Room: Auditorium
9:10 AM Main Sensor Fab: Infrastucture
Infrastucture
9:10 AM - 10:30 AM
Room: Auditorium
Contributions

9:10 AM Anlagen der Infrastruktur - Florian Schopper (MPG HLL)

9:40 AM Reinigung und Nassbänke - Bernd Liebig Martina Schnecke
10:30 AM Coffee
Coffee
10:30 AM - 11:00 AM
Room: Auditorium
11:00 AM Main Sensor Fab: I
I
11:00 AM - 12:40 PM
Room: Auditorium
Contributions

11:00 AM Ofen - Gerhard Schaller

11:20 AM Implanter - Mark Matiaske

11:40 AM Messgeräte - Florian Schopper (MPG HLL)

12:00 PM Litho - Raik Lehmann (MPG HLL)
12:40 PM Lunch
Lunch
12:40 PM - 2:00 PM
Room: Auditorium
2:00 PM Main Sensor Fab: II
II
2:00 PM - 3:30 PM
Room: Auditorium
Contributions

2:00 PM Belichter - Patrick Czubatynski

2:20 PM Ätzung - nass und trocken - Behzad Mohandeszadeh Jasmin Damore

2:40 PM Sputter - Mark Matiaske
3:30 PM Coffee
Coffee
3:30 PM - 4:00 PM
Room: Auditorium
4:00 PM Main Sensor Fab: III und Future
III und Future
4:00 PM - 5:30 PM
Room: Auditorium
Contributions

4:00 PM CMP - Raik Lehman

4:20 PM Datenbank - Raik Lehman

4:40 PM Neue Anlagen - Florian Schopper (MPG HLL)
6:00 PM Dinner
Dinner
6:00 PM - 7:00 PM
Room: Auditorium
7:30 PM Keynote: New Technologies and New Process Steps - Opportunities in the Quantum World - Laci Andricek (MPG Halbleiterlabor)
Keynote: New Technologies and New Process Steps - Opportunities in the Quantum World
- Laci Andricek (MPG Halbleiterlabor)
7:30 PM - 8:30 PM
Room: Auditorium
Friday, October 17, 2025
9:00 AM Cu Lab
9:00 AM - 10:30 AM
Room: Auditorium
Contributions

9:00 AM Overview, Litho - Laci Andricek (MPG Halbleiterlabor)

9:20 AM Sputter und Metrologie - Bernd Liebig

9:40 AM Galvanik - Gerhard Liemann
10:30 AM Coffee
Coffee
10:30 AM - 11:00 AM
Room: Auditorium
11:00 AM R&D Lab
11:00 AM - 12:30 PM
Room: Auditorium
Contributions

11:00 AM Overview and Litho - Laci Andricek (MPG Halbleiterlabor)

11:20 AM Ofen - Gerhard Liemann

11:40 AM ICP-DRIE - Omar Fakhr

12:00 PM Metrologie - Yassir Ali
12:30 PM Lunch
Lunch
12:30 PM - 1:30 PM
Room: Auditorium
1:30 PM QLab
1:30 PM - 3:00 PM
Room: Auditorium
Contributions

1:30 PM Overview - Laci Andricek (MPG Halbleiterlabor)

1:40 PM EBL for HLL Projects - Yassir Ali (MPG HLL)

2:00 PM WMI Processes and Tools - Julius Feigl Lasse Södergren (WMI)
3:00 PM Coffee
Coffee
3:00 PM - 3:30 PM
Room: Auditorium
3:30 PM Interconnect/Vereinzelung
3:30 PM - 4:50 PM
Room: Auditorium
Contributions

3:30 PM Overview - Laci Andricek (MPG Halbleiterlabor)

3:50 PM Bump Bonding - Christopher Roth

4:10 PM Wire Bonding - Danilo Miesner

4:30 PM Lasercutting - Alona Mayatska Mark Matiaske
4:50 PM Wrap-up
Wrap-up
4:50 PM - 5:00 PM
Room: Auditorium

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