HLL Technology Summit 2025

Oct 15, 2025, 5:00 PM → Oct 17, 2025, 5:05 PM Europe/Berlin

Auditorium (Tutzing Castle)

This is the agenda of the first summit to discuss the HLL technology status and prospects. The meeting is organised as a retreat and will be held at Tutzing Castle, Lake Starnberg. The summit is focused on silicon radiation sensor technology with extension towards quantum devices, including technology characterisation, assembly, and interconnection technology.

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Wed, October 15

5:00 PM Check-In

6:00 PM Dinner

1 Keynote: MPG HLL - current status and prospects

Keynote presentation followed by extensive Q/A and discussion

Speaker: Jelena Ninkovic (MPG Halbleiterlabor)

Thu, October 16

2 Welcome

Main Sensor Fab: Infrastucture

3 Anlagen der Infrastruktur

Speaker: Florian Schopper (MPG HLL)

4 Reinigung und Nassbänke

Speakers: Bernd Liebig, Martina Schnecke

10:30 AM Coffee

Main Sensor Fab: I

5 Ofen

Speaker: Gerhard Schaller

6 Implanter

Speaker: Mark Matiaske

7 Messgeräte

Speaker: Florian Schopper (MPG HLL)

8 Litho

Speaker: Raik Lehmann (MPG HLL)

12:40 PM Lunch

Main Sensor Fab: II

9 Belichter

Speaker: Patrick Czubatynski

10 Ätzung - nass und trocken

Speakers: Behzad Mohandeszadeh, Jasmin Damore

11 Sputter

Speaker: Mark Matiaske

3:30 PM Coffee

Main Sensor Fab: III und Future

12 CMP

Speaker: Raik Lehman

13 Datenbank

Speaker: Raik Lehman

14 Neue Anlagen

Speaker: Florian Schopper (MPG HLL)

6:00 PM Dinner

15 Keynote: New Technologies and New Process Steps - Opportunities in the Quantum World

Speaker: Laci Andricek (MPG Halbleiterlabor)

Fri, October 17

Cu Lab

16 Overview, Litho

Speaker: Laci Andricek (MPG Halbleiterlabor)

17 Sputter und Metrologie

Speaker: Bernd Liebig

18 Galvanik

Speaker: Gerhard Liemann

10:30 AM Coffee

R&D Lab

19 Overview and Litho

Speaker: Laci Andricek (MPG Halbleiterlabor)

20 Ofen

Speaker: Gerhard Liemann

21 ICP-DRIE

Speaker: Omar Fakhr

22 Metrologie

Speaker: Yassir Ali

12:30 PM Lunch

QLab

23 Overview

Speaker: Laci Andricek (MPG Halbleiterlabor)

24 EBL for HLL Projects

Speaker: Yassir Ali (MPG HLL)

25 WMI Processes and Tools

Speakers: Julius Feigl, Lasse Södergren (WMI)

3:00 PM Coffee

Interconnect/Vereinzelung

26 Overview

Speaker: Laci Andricek (MPG Halbleiterlabor)

27 Bump Bonding

Speaker: Christopher Roth

28 Wire Bonding

Speaker: Danilo Miesner

29 Lasercutting

Speakers: Alona Mayatska, Mark Matiaske

30 Wrap-up