HLL Technology Summit 2025

Oct 15, 2025, 5:00 PM → Oct 17, 2025, 5:05 PM Europe/Berlin

Auditorium (Tutzing Castle)

This is the agenda of the first summit to discuss the HLL technology status and prospects. The meeting is organised as a retreat and will be held at Tutzing Castle, Lake Starnberg. The summit is focused on silicon radiation sensor technology with extension towards quantum devices, including technology characterisation, assembly, and interconnection technology.

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Wed, October 15

5:00 PM → 6:00 PM Check-In

6:00 PM → 7:00 PM Dinner

7:00 PM → 8:00 PM Keynote: MPG HLL - current status and prospects

Keynote presentation followed by extensive Q/A and discussion

Speaker: Jelena Ninkovic (MPG Halbleiterlabor)

Thu, October 16

9:00 AM → 9:10 AM Welcome

9:10 AM → 10:30 AM Main Sensor Fab: Infrastucture

9:10 AM Anlagen der Infrastruktur

Speaker: Florian Schopper (MPG HLL)

9:40 AM Reinigung und Nassbänke

Speakers: Bernd Liebig, Martina Schnecke

10:30 AM → 11:00 AM Coffee

11:00 AM → 12:40 PM Main Sensor Fab: I

11:00 AM Ofen

Speaker: Gerhard Schaller

11:20 AM Implanter

Speaker: Mark Matiaske

11:40 AM Messgeräte

Speaker: Florian Schopper (MPG HLL)

12:00 PM Litho

Speaker: Raik Lehmann (MPG HLL)

12:40 PM → 2:00 PM Lunch

2:00 PM → 3:30 PM Main Sensor Fab: II

2:00 PM Belichter

Speaker: Patrick Czubatynski

2:20 PM Ätzung - nass und trocken

Speakers: Behzad Mohandeszadeh, Jasmin Damore

2:40 PM Sputter

Speaker: Mark Matiaske

3:30 PM → 4:00 PM Coffee

4:00 PM → 5:30 PM Main Sensor Fab: III und Future

4:00 PM CMP

Speaker: Raik Lehman

4:20 PM Datenbank

Speaker: Raik Lehman

4:40 PM Neue Anlagen

Speaker: Florian Schopper (MPG HLL)

6:00 PM → 7:00 PM Dinner

7:30 PM → 8:30 PM Keynote: New Technologies and New Process Steps - Opportunities in the Quantum World

Speaker: Laci Andricek (MPG Halbleiterlabor)

Fri, October 17

9:00 AM → 10:30 AM Cu Lab

9:00 AM Overview, Litho

Speaker: Laci Andricek (MPG Halbleiterlabor)

9:20 AM Sputter und Metrologie

Speaker: Bernd Liebig

9:40 AM Galvanik

Speaker: Gerhard Liemann

10:30 AM → 11:00 AM Coffee

11:00 AM → 12:30 PM R&D Lab

11:00 AM Overview and Litho

Speaker: Laci Andricek (MPG Halbleiterlabor)

11:20 AM Ofen

Speaker: Gerhard Liemann

11:40 AM ICP-DRIE

Speaker: Omar Fakhr

12:00 PM Metrologie

Speaker: Yassir Ali

12:30 PM → 1:30 PM Lunch

1:30 PM → 3:00 PM QLab

1:30 PM Overview

Speaker: Laci Andricek (MPG Halbleiterlabor)

1:40 PM EBL for HLL Projects

Speaker: Yassir Ali (MPG HLL)

2:00 PM WMI Processes and Tools

Speakers: Julius Feigl, Lasse Södergren (WMI)

3:00 PM → 3:30 PM Coffee

3:30 PM → 4:50 PM Interconnect/Vereinzelung

3:30 PM Overview

Speaker: Laci Andricek (MPG Halbleiterlabor)

3:50 PM Bump Bonding

Speaker: Christopher Roth

4:10 PM Wire Bonding

Speaker: Danilo Miesner

4:30 PM Lasercutting

Speakers: Alona Mayatska, Mark Matiaske

4:50 PM → 5:00 PM Wrap-up