MPG Halbleiterlabor Project Review 2022

Session

Technology

14 Dec 2022, 15:15

Conveners

Technology: I

• Florian Schopper (MPG HLL)

Technology: II

• Gerhard Schaller (MPG HLL)

Technology: III

• Raik Lehmann (MPG HLL)

Technology: IV

• Laci Andricek (MPG Halbleiterlabor)

Technology: V

• Mark Matiaske (MPG HLL)

1. Introduction

Jelena Ninkovic (MPG Halbleiterlabor)

14/12/2022, 15:15

2. Lithography

Raik Lehmann (MPG HLL)

14/12/2022, 15:30

3. High Temperature processes

Gerhard Schaller (MPG HLL)

14/12/2022, 16:00

4. Wet processes - cleaning

Martin Soyer (MPG HLL)

14/12/2022, 17:00

5. Wet processes - etching

Raik Lehmann (MPG HLL)

14/12/2022, 17:30

6. Implanter - Sputter

Mark Matiaske (MPG HLL)

14/12/2022, 18:00

7. Plasma etching - status and plans for Garching

Florian Schopper (MPG HLL)

15/12/2022, 09:00

8. Inspection tools

Christian Zirr (MPG HLL)

15/12/2022, 09:30

9. Application lab

Laci Andricek (MPG Halbleiterlabor)

15/12/2022, 10:00

10. Copper line

Gerhard Liemann (MPG HLL)

15/12/2022, 11:00

11. Vertical interconnection

Silvia Krivokuca (MPG HLL)

15/12/2022, 11:30

12. Bonding

Danilo Mießner (MPG HLL)

15/12/2022, 12:00

13. Laser cutters

Alona Mayatska (MPG HLL)

15/12/2022, 14:00

14. Ramp-up technology sequence and projects

Florian Schopper (MPG HLL), Gerhard Schaller (MPG HLL)

15/12/2022, 14:30