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MPG Halbleiterlabor Project Review 2022

14–17 Dec 2022
UTC timezone

Session

Technology

14 Dec 2022, 15:15

Conveners

Technology: I

  • Florian Schopper (MPG HLL)

Technology: II

  • Gerhard Schaller (MPG HLL)

Technology: III

  • Raik Lehmann (MPG HLL)

Technology: IV

  • Laci Andricek (MPG Halbleiterlabor)

Technology: V

  • Mark Matiaske (MPG HLL)

Presentation materials

There are no materials yet.

  1. 1. Introduction
    Jelena Ninkovic (MPG Halbleiterlabor)
    14/12/2022, 15:15
  2. 2. Lithography
    Raik Lehmann (MPG HLL)
    14/12/2022, 15:30
  3. 3. High Temperature processes
    Gerhard Schaller (MPG HLL)
    14/12/2022, 16:00
  4. 4. Wet processes - cleaning
    Martin Soyer (MPG HLL)
    14/12/2022, 17:00
  5. 5. Wet processes - etching
    Raik Lehmann (MPG HLL)
    14/12/2022, 17:30
  6. 6. Implanter - Sputter
    Mark Matiaske (MPG HLL)
    14/12/2022, 18:00
  7. 7. Plasma etching - status and plans for Garching
    Florian Schopper (MPG HLL)
    15/12/2022, 09:00
  8. 8. Inspection tools
    Christian Zirr (MPG HLL)
    15/12/2022, 09:30
  9. 9. Application lab
    Laci Andricek (MPG Halbleiterlabor)
    15/12/2022, 10:00
  10. 10. Copper line
    Gerhard Liemann (MPG HLL)
    15/12/2022, 11:00
  11. 11. Vertical interconnection
    Silvia Krivokuca (MPG HLL)
    15/12/2022, 11:30
  12. 12. Bonding
    Danilo Mießner (MPG HLL)
    15/12/2022, 12:00
  13. 13. Laser cutters
    Alona Mayatska (MPG HLL)
    15/12/2022, 14:00
  14. 14. Ramp-up technology sequence and projects
    Florian Schopper (MPG HLL), Gerhard Schaller (MPG HLL)
    15/12/2022, 14:30
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