MPG Halbleiterlabor Project Review 2022

UTC
Description

​ MPG HLL: Technology and Project Review

Registration
Registration for HLL@Ringberg
Participants
  • Alexander Bähr
  • Allen Caldwell
  • Alona Mayatska
  • Andreas Wassatsch
  • Andrey Vostrukhin
  • Anne Kalthoff
  • Carsten Niebuhr
  • Christian Kiesling
  • Christian Koffmane
  • Christian Zirr
  • Danilo Mießner
  • Eduard Prinker
  • Eva Tafelmayer
  • Florian Schopper
  • Gerhard Liemann
  • Gerhard Schaller
  • Gisela Schütz
  • Hans Krüger
  • Hossein Faridmehr
  • Irina Riazanova
  • Jasmin Damore
  • Jelena Ninkovic
  • Johannes Müller-Seidlitz
  • Johannes Treis
  • Joyce Poon
  • Korbinian Urban
  • Laci Andricek
  • Mark Matiaske
  • Martin Hensel
  • Martin Soyer
  • Martina Schnecke
  • MD SHARIF HASAN
  • Mikhail Polovykh
  • Mr. Kolly
  • Peter Lechner
  • Raik Lehmann
  • Rainer Richter
  • Sami Solanki
  • Sascha Epp
  • Sebastian Stadler
  • Sejla Hadzic
  • Siggi Bethke
  • Silvia Krivokuca
  • Tahir Vucic
  • Thomas Selle
  • Wolfgang Treberspurg
    • Plenary: Opening Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Jelena Ninkovic (MPG Halbleiterlabor)
    • Projects: Project status Green Seminar Room (Ringberg )

      Green Seminar Room

      Ringberg

      Convener: Christian Koffmane (MPI Halbleiterlabor)
      • 1
        Project status FSP TNG
        Speaker: Alexander Bähr (HLL)
      • 2
        Project status EDET80k
        Speaker: Johannes Treis (MPG Semiconductor Laboratory)
      • 3
        PXD13
        Speaker: Alexander Bähr (HLL)
    • Technology: I Lecture Hall (Ringberg )

      Lecture Hall

      Ringberg

      Convener: Florian Schopper (MPG HLL)
      • 4
        Introduction
        Speaker: Jelena Ninkovic (MPG Halbleiterlabor)
      • 5
        Lithography
        Speaker: Raik Lehmann (MPG HLL)
      • 6
        High Temperature processes
        Speaker: Gerhard Schaller (MPG HLL)
    • 16:30
      Coffee/Tea Gartenzimmer (Ringberg)

      Gartenzimmer

      Ringberg

    • Projects: Software & Firmware Green Seminar Room (Ringberg)

      Green Seminar Room

      Ringberg

      Convener: Alexander Bähr (HLL)
    • Technology: II Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Gerhard Schaller (MPG HLL)
      • 11
        Wet processes - cleaning
        Speaker: Martin Soyer (MPG HLL)
      • 12
        Wet processes - etching
        Speaker: Raik Lehmann (MPG HLL)
      • 13
        Implanter - Sputter
        Speaker: Mark Matiaske (MPG HLL)
    • 18:30
      Dinner
    • Free Discussion TBD (Ringberg)

      TBD

      Ringberg

    • Projects: Next Steps Green Seminar Room (Ringberg)

      Green Seminar Room

      Ringberg

      Convener: Johannes Treis (MPG Semiconductor Laboratory)
    • Technology: III Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Raik Lehmann (MPG HLL)
      • 20
        Plasma etching - status and plans for Garching
        Speaker: Florian Schopper (MPG HLL)
      • 21
        Inspection tools
        Speaker: Christian Zirr (MPG HLL)
      • 22
        Application lab
        Speaker: Laci Andricek (MPG Halbleiterlabor)
    • 10:30
      Coffee/Tea Gartenzimmer (Ringberg)

      Gartenzimmer

      Ringberg

    • Projects: Data Organisation Green Seminar Room (Ringberg)

      Green Seminar Room

      Ringberg

      Convener: Andreas Wassatsch (HLL)
      • 23
        Motivation
        Speaker: Johannes Treis (MPG Semiconductor Laboratory)
      • 24
        Overview talk: Options for Data archiving and version control
        Speaker: Martin Hensel (HLL)
      • 25
        Open discussion

        How to organize
        - Archives for Hardware data
        - PCB designs
        - Mechanical drawings
        - Firmware archiving & version control
        - Software archiving & version control
        - Component database
        - Under special consideration of collaborative issues: How to share & conveniently work together?
        - Documentation

    • Technology: IV Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Laci Andricek (MPG Halbleiterlabor)
      • 26
        Copper line
        Speaker: Gerhard Liemann (MPG HLL)
      • 27
        Vertical interconnection
        Speaker: Silvia Krivokuca (MPG HLL)
      • 28
        Bonding
        Speaker: Danilo Mießner (MPG HLL)
    • 12:30
      Lunch
    • Projects: New measurement Lab Green Seminar Room (Ringberg)

      Green Seminar Room

      Ringberg

      Conveners: Christian Koffmane (MPI Halbleiterlabor), Thomas Selle
      • 29
        Organization of the new Measurement lab in Garching

        Open discussion (moderated by chk/ tjs)

    • Technology: V Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Mark Matiaske (MPG HLL)
      • 30
        Laser cutters
        Speaker: Alona Mayatska (MPG HLL)
      • 31
        Ramp-up technology sequence and projects
        Speakers: Florian Schopper (MPG HLL), Gerhard Schaller (MPG HLL)
    • 15:30
      Coffee/Tea Lecture Hall Foyer (Ringberg)

      Lecture Hall Foyer

      Ringberg

    • Plenary: I Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Jelena Ninkovic (MPG Halbleiterlabor)
      • 32
        EDET80k -project
        Speaker: Johannes Treis (MPG Semiconductor Laboratory)
      • 33
        FSP TNG project
        Speaker: Alexander Bähr (HLL)
      • 34
        BELLE II PXD
        Speaker: Carsten Niebuhr (DESY)
    • Christmas reception: Garten Zimmer
    • 18:30
      Dinner
    • Free Discussion Lecture hall (Ringberg)

      Lecture hall

      Ringberg

      Convener: Jelena Ninkovic (MPG Halbleiterlabor)
    • 12:30
      Lunch
    • Plenary: II Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Alexander Bähr (HLL)
      • 35
        DANAE
        Speaker: Wolfgang Treberspurg (OeAW)
      • 36
        Athena WFI
        Speaker: Johannes Mueller-Seidlitz (MPE)
      • 37
        TRISTAN
        Speaker: Korbinian Urban (Max-Planck-Institut für Physik )
    • 15:30
      Coffee/Tea Lecture Hall Foyer (Ringberg )

      Lecture Hall Foyer

      Ringberg

    • Plenary: III Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Laci Andricek (MPG Halbleiterlabor)
      • 38
        4SCB
      • 39
        Layout simulation tools and plans
        Speaker: Rainer Richter (MPI)
      • 40
        Technology development - sensor technology
        Speaker: Florian Schopper (MPG HLL)
    • Castle tour: Guided tour
    • 18:30
      Dinner
    • Projects: Lessons Learned - How to do better Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Jelena Ninkovic (MPG Halbleiterlabor)
      • 41
        Motivation
        Speaker: Jelena Ninkovic (MPG Halbleiterlabor)
      • 42
        Lessons learned from MIXS
        Speaker: Johannes Treis (MPG Semiconductor Laboratory)
      • 43
        Lessons learned from FSP I
        Speakers: Johannes Treis (MPG Semiconductor Laboratory), Thomas Selle
      • 44
        Lessons learned from EDET
        Speaker: Johannes Treis (MPG Semiconductor Laboratory)
      • 45
        Lessons learned from LAMP
        Speakers: Martin Hensel (HLL), Thomas Selle
      • 46
        Lessons learned from FSP TNG
        Speaker: Alexander Bähr (HLL)
      • 47
        Lessons learned from BELLE
        Speakers: Christian Koffmane (MPI Halbleiterlabor), Laci Andricek (MPG Halbleiterlabor)
      • 48
        Lessons learned from ATHENA
        Speaker: Peter Lechner (MPG HLL)
      • 49
        Lessons learned from GREST
        Speaker: Alexander Bähr (HLL)
    • Plenary: Move to Garching Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Jelena Ninkovic (MPG Halbleiterlabor)
      • 50
        Planning of the move
        Speaker: Jelena Ninkovic (MPG Halbleiterlabor)
    • 10:30
      Coffee/Tea
    • Plenary: Wrap-up Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg