MPG Halbleiterlabor Project Review 2022

UTC
Description

​ MPG HLL: Technology and Project Review

Registration
Registration for HLL@Ringberg
Participants
  • Alexander Bähr
  • Allen Caldwell
  • Alona Mayatska
  • Andreas Wassatsch
  • Andrey Vostrukhin
  • Anne Kalthoff
  • Carsten Niebuhr
  • Christian Kiesling
  • Christian Koffmane
  • Christian Zirr
  • Danilo Mießner
  • Eduard Prinker
  • Eva Tafelmayer
  • Florian Schopper
  • Gerhard Liemann
  • Gerhard Schaller
  • Gisela Schütz
  • Hans Krüger
  • Hossein Faridmehr
  • Irina Riazanova
  • Jasmin Damore
  • Jelena Ninkovic
  • Johannes Müller-Seidlitz
  • Johannes Treis
  • Joyce Poon
  • Korbinian Urban
  • Laci Andricek
  • Mark Matiaske
  • Martin Hensel
  • Martin Soyer
  • Martina Schnecke
  • MD SHARIF HASAN
  • Mikhail Polovykh
  • Mr. Kolly
  • Peter Lechner
  • Raik Lehmann
  • Rainer Richter
  • Sami Solanki
  • Sascha Epp
  • Sebastian Stadler
  • Sejla Hadzic
  • Siggi Bethke
  • Silvia Krivokuca
  • Tahir Vucic
  • Thomas Selle
  • Wolfgang Treberspurg
    • 15:00 15:15
      Plenary: Opening Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Jelena Ninkovic (MPG Halbleiterlabor)
    • 15:15 16:30
      Projects: Project status Green Seminar Room (Ringberg )

      Green Seminar Room

      Ringberg

      Convener: Christian Koffmane (MPI Halbleiterlabor)
      • 15:15
        Project status FSP TNG 25m
        Speaker: Alexander Bähr (HLL)
      • 15:40
        Project status EDET80k 25m
        Speaker: Johannes Treis (MPG Semiconductor Laboratory)
      • 16:05
        PXD13 25m
        Speaker: Alexander Bähr (HLL)
    • 15:15 16:30
      Technology: I Lecture Hall (Ringberg )

      Lecture Hall

      Ringberg

      Convener: Florian Schopper (MPG HLL)
      • 15:15
        Introduction 15m
        Speaker: Jelena Ninkovic (MPG Halbleiterlabor)
      • 15:30
        Lithography 30m
        Speaker: Raik Lehmann (MPG HLL)
      • 16:00
        High Temperature processes 30m
        Speaker: Gerhard Schaller (MPG HLL)
    • 16:30 17:00
      Coffee/Tea 30m Gartenzimmer (Ringberg)

      Gartenzimmer

      Ringberg

    • 17:00 18:30
      Projects: Software & Firmware Green Seminar Room (Ringberg)

      Green Seminar Room

      Ringberg

      Convener: Alexander Bähr (HLL)
    • 17:00 18:30
      Technology: II Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Gerhard Schaller (MPG HLL)
      • 17:00
        Wet processes - cleaning 30m
        Speaker: Martin Soyer (MPG HLL)
      • 17:30
        Wet processes - etching 30m
        Speaker: Raik Lehmann (MPG HLL)
      • 18:00
        Implanter - Sputter 30m
        Speaker: Mark Matiaske (MPG HLL)
    • 18:30 20:00
      Dinner 1h 30m
    • 20:00 21:00
      Free Discussion TBD (Ringberg)

      TBD

      Ringberg

    • 09:00 10:30
      Projects: Next Steps Green Seminar Room (Ringberg)

      Green Seminar Room

      Ringberg

      Convener: Johannes Treis (MPG Semiconductor Laboratory)
    • 09:00 10:30
      Technology: III Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Raik Lehmann (MPG HLL)
      • 09:00
        Plasma etching - status and plans for Garching 30m
        Speaker: Florian Schopper (MPG HLL)
      • 09:30
        Inspection tools 30m
        Speaker: Christian Zirr (MPG HLL)
      • 10:00
        Application lab 30m
        Speaker: Laci Andricek (MPG Halbleiterlabor)
    • 10:30 11:00
      Coffee/Tea 30m Gartenzimmer (Ringberg)

      Gartenzimmer

      Ringberg

    • 11:00 12:30
      Projects: Data Organisation Green Seminar Room (Ringberg)

      Green Seminar Room

      Ringberg

      Convener: Andreas Wassatsch (HLL)
      • 11:00
        Motivation 15m
        Speaker: Johannes Treis (MPG Semiconductor Laboratory)
      • 11:15
        Overview talk: Options for Data archiving and version control 30m
        Speaker: Martin Hensel (HLL)
      • 11:45
        Open discussion 45m

        How to organize
        - Archives for Hardware data
        - PCB designs
        - Mechanical drawings
        - Firmware archiving & version control
        - Software archiving & version control
        - Component database
        - Under special consideration of collaborative issues: How to share & conveniently work together?
        - Documentation

    • 11:00 12:30
      Technology: IV Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Laci Andricek (MPG Halbleiterlabor)
      • 11:00
        Copper line 30m
        Speaker: Gerhard Liemann (MPG HLL)
      • 11:30
        Vertical interconnection 30m
        Speaker: Silvia Krivokuca (MPG HLL)
      • 12:00
        Bonding 30m
        Speaker: Danilo Mießner (MPG HLL)
    • 12:30 14:00
      Lunch 1h 30m
    • 14:00 15:30
      Projects: New measurement Lab Green Seminar Room (Ringberg)

      Green Seminar Room

      Ringberg

      Conveners: Christian Koffmane (MPI Halbleiterlabor), Thomas Selle
      • 14:00
        Organization of the new Measurement lab in Garching 1h 30m

        Open discussion (moderated by chk/ tjs)

    • 14:00 15:30
      Technology: V Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Mark Matiaske (MPG HLL)
      • 14:00
        Laser cutters 30m
        Speaker: Alona Mayatska (MPG HLL)
      • 14:30
        Ramp-up technology sequence and projects 1h
        Speakers: Florian Schopper (MPG HLL), Gerhard Schaller (MPG HLL)
    • 15:30 16:00
      Coffee/Tea 30m Lecture Hall Foyer (Ringberg)

      Lecture Hall Foyer

      Ringberg

    • 16:00 18:00
      Plenary: I Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Jelena Ninkovic (MPG Halbleiterlabor)
      • 16:00
        EDET80k -project 40m
        Speaker: Johannes Treis (MPG Semiconductor Laboratory)
      • 16:40
        FSP TNG project 40m
        Speaker: Alexander Bähr (HLL)
      • 17:20
        BELLE II PXD 40m
        Speaker: Carsten Niebuhr (DESY)
    • 18:00 18:30
      Christmas reception: Garten Zimmer
    • 18:30 20:00
      Dinner 1h 30m
    • 08:00 12:30
      Free Discussion Lecture hall (Ringberg)

      Lecture hall

      Ringberg

      Convener: Jelena Ninkovic (MPG Halbleiterlabor)
    • 12:30 14:00
      Lunch 1h 30m
    • 14:00 15:30
      Plenary: II Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Alexander Bähr (HLL)
      • 14:00
        DANAE 30m
        Speaker: Wolfgang Treberspurg (OeAW)
      • 14:30
        Athena WFI 30m
        Speaker: Johannes Mueller-Seidlitz (MPE)
      • 15:00
        TRISTAN 30m
        Speaker: Korbinian Urban (Max-Planck-Institut für Physik )
    • 15:30 16:00
      Coffee/Tea 30m Lecture Hall Foyer (Ringberg )

      Lecture Hall Foyer

      Ringberg

    • 16:00 17:30
      Plenary: III Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Laci Andricek (MPG Halbleiterlabor)
      • 16:00
        4SCB 30m
      • 16:30
        Layout simulation tools and plans 30m
        Speaker: Rainer Richter (MPI)
      • 17:00
        Technology development - sensor technology 30m
        Speaker: Florian Schopper (MPG HLL)
    • 17:30 18:30
      Castle tour: Guided tour
    • 18:30 20:00
      Dinner 1h 30m
    • 20:00 21:30
      Projects: Lessons Learned - How to do better Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Jelena Ninkovic (MPG Halbleiterlabor)
      • 20:00
        Motivation 10m
        Speaker: Jelena Ninkovic (MPG Halbleiterlabor)
      • 20:10
        Lessons learned from MIXS 10m
        Speaker: Johannes Treis (MPG Semiconductor Laboratory)
      • 20:20
        Lessons learned from FSP I 10m
        Speakers: Johannes Treis (MPG Semiconductor Laboratory), Thomas Selle
      • 20:30
        Lessons learned from EDET 10m
        Speaker: Johannes Treis (MPG Semiconductor Laboratory)
      • 20:40
        Lessons learned from LAMP 10m
        Speakers: Martin Hensel (HLL), Thomas Selle
      • 20:50
        Lessons learned from FSP TNG 10m
        Speaker: Alexander Bähr (HLL)
      • 21:00
        Lessons learned from BELLE 10m
        Speakers: Christian Koffmane (MPI Halbleiterlabor), Laci Andricek (MPG Halbleiterlabor)
      • 21:10
        Lessons learned from ATHENA 10m
        Speaker: Peter Lechner (MPG HLL)
      • 21:20
        Lessons learned from GREST 10m
        Speaker: Alexander Bähr (HLL)
    • 09:00 10:30
      Plenary: Move to Garching Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg

      Convener: Jelena Ninkovic (MPG Halbleiterlabor)
      • 09:00
        Planning of the move 1h 30m
        Speaker: Jelena Ninkovic (MPG Halbleiterlabor)
    • 10:30 11:00
      Coffee/Tea 30m
    • 11:00 12:00
      Plenary: Wrap-up Lecture Hall (Ringberg)

      Lecture Hall

      Ringberg